JPH02129196U - - Google Patents

Info

Publication number
JPH02129196U
JPH02129196U JP3821589U JP3821589U JPH02129196U JP H02129196 U JPH02129196 U JP H02129196U JP 3821589 U JP3821589 U JP 3821589U JP 3821589 U JP3821589 U JP 3821589U JP H02129196 U JPH02129196 U JP H02129196U
Authority
JP
Japan
Prior art keywords
conductors
pair
pairs
voltage
adsorption layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3821589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3821589U priority Critical patent/JPH02129196U/ja
Publication of JPH02129196U publication Critical patent/JPH02129196U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP3821589U 1989-03-31 1989-03-31 Pending JPH02129196U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3821589U JPH02129196U (en]) 1989-03-31 1989-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3821589U JPH02129196U (en]) 1989-03-31 1989-03-31

Publications (1)

Publication Number Publication Date
JPH02129196U true JPH02129196U (en]) 1990-10-24

Family

ID=31546020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3821589U Pending JPH02129196U (en]) 1989-03-31 1989-03-31

Country Status (1)

Country Link
JP (1) JPH02129196U (en])

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